Wavelength 308 nm

 

•   Very powerful excimerlaser
•   Low jitter
  
•   Low pulse to pulse instability
•   Long gas service time
•   Long durability of optics
•   Corona free ionization
•   Integrated vacuum pump

Modell	EX5A	EX5	EX10
Pulse Energy (max) [mJ]	12	8
Repetition Rate [Hz]	250/500/1000		300
Average Power [W]	4.0 @ 500 Hz	2.5 @ 500 Hz	2.4 @ 300 Hz
Pulse Width [ns]	8 - 10	8	6 - 8
Beam Diameter [mm]	6 x 3 / V x H

Modell	EX50	EX100	EX350
Pulse Energy (max) [mJ]	22	65	125
Repetition Rate [Hz]	250/500/750/1000	60/125/250/500	20/50
Average Power [W]	10 @ 500 Hz	13 @ 250 Hz	5 @ 50 Hz
Pulse Width [ns]	17 - 20	15 - 22	20 - 26
Beam Diameter [mm]	9 x 4 / V x H	10 x 5 / V x H	19 x 7 / V x H

Excimer-Laser

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