Wavelength 157 nm
- Very powerful excimerlaser
- Low jitter
- Low pulse to pulse instability
- Long gas service time
- Long durability of optics
- Corona free ionization
- Integrated vacuum pump
| Modell | EX5A | EX5 | |
|---|---|---|---|
|
Pulse Energy (max) [mJ] |
1.5 |
||
|
Repetition Rate [Hz] |
250/500/1000 |
||
|
Average Power [W] |
0.5 @ 500 Hz |
0.65 @ 500 Hz |
|
|
Pulse Width [ns] |
8 – 10 |
8 |
|
|
Beam Diameter [mm] |
6 x 3 / V x H |
||
| Modell | EX50 | EX100 | EX350 |
|---|---|---|---|
|
Pulse Energy (max) [mJ] |
2.5 |
10 |
20 |
|
Repetition Rate [Hz] |
250/500/750/1000 |
60/125/250/500 |
20/50 |
|
Average Power [W] |
1.0 @ 500 Hz |
2.0 @ 250 Hz |
0.9 @ 50 Hz |
|
Pulse Width [ns] |
17 – 20 |
15 – 22 |
20 – 26 |
|
Beam Diameter [mm] |
9 x 4 / V x H |
10 x 5 / V x H |
19 x 7 / V x H |
