Wavelength 10.6 µm or 9.3 µm

 

  •   Very powerful excimerlaser
  •   Low jitter
  •   Low pulse to pulse instability
  •   Long gas service time
  •   Long durability of optics
  •   Corona free ionization
  •   Integrated vacuum pump
Modell EX 5 CO² EX 10A CO² EX 10 CO² EX 100 CO² EX 350 CO²
Pulse Energy [mJ] TEMoo
20
25
40
100
150
Pulse Energy [mj] Multimode
20
25
75
400
1000
Repetition Rate [Hz]
200/400
250/500
100
60
10
Average Power [W]
3/6
5/10
5
20
9
Pulse Width [ns]
100
120
Beam Diameter [mm]
3
4
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