Wavelength 308 nm

 

  •   Very powerful excimerlaser
  •   Low jitter
  •   Low pulse to pulse instability
  •   Long gas service time
  •   Long durability of optics
  •   Corona free ionization
  •   Integrated vacuum pump
Model EX5A EX5 EX10
Pulse Energy (max) [mJ]
12
8
Repetition Rate [Hz]
250/500/1000
300
Average Power [W]
4.0 @ 500 Hz
2.5 @ 500 Hz
2.4 @ 300 Hz
Pulse Width [ns]
8 - 10
8
6 - 8
Beam Diameter [mm]
6 x 3 / V x H
Model EX50 EX100 EX350
Pulse Energy (max) [mJ]
22
65
125
Repetition Rate [Hz]
250/500/750/1000
60/125/250/500
20/50
Average Power [W]
10 @ 500 Hz
13 @ 250 Hz
5 @ 50 Hz
Pulse Width [ns]
17 - 20
15 - 22
20 - 26
Beam Diameter [mm]
9 x 4 / V x H
10 x 5 / V x H
19 x 7 / V x H