Galvoscanner, digital

Canon offers fully digital high-performance galvanometer systems based on the self-developed optical LED encoder (digital position sensor). The galvanometer scanners offer very high precision and accuracy, which surpasses all analog galvanometer scanners. Canon’s galvanometers are available in three different motor types that support laser beam diameters from 3 mm to 30 mm.

Characteristics

  • Canon-owned optical LED encoder (digital position sensor)
  • Digital servo controller
  • High repeatability and linearity
  • Very high resolution
  • Extremely low thermal drift
  • Self-Tuning, galvo matching software

Applications

  • Laser eye surgery
  • Confocal microscopy
  • OCT-Scanner
  • Laser marking and scratching
  • Laser projection imaging
  • Micromachining
Model GM-1005 GM-1010 GM-1015 GM-1020
Max. Scan Angle [°]
± 30
± 20
Aperture [mm]
3 - 7
8 - 10
12 - 20
20 - 30
Command Resolution [µrad]
2.14
0.77
0.51
Position Repeatability [µrad p-p]
5.0
3.0
Gain Drift
not measurable
Step Response 1 % Step [µsec]
200
280
390
540
Zero Drift [µrad/°C]
3.0
Long-term Drift (after warm-up) [urad/8h]
5.5
5
Linearity (mechanically) [ µrad/30°]
100